Wafer Loader & Inspection System AL120-WM
With Mapping E142 compatible to Olympus AL120

Benefits
Seamless integrate with Olympus AL-120-12 and MX-series microscope systems
Programmable motorised stage for different inspection mode and patterns
Graphical and GUI electronic wafer map or bin code map configuration
Automatic wafer ID reader
Auto-focus and automatic wafer alignment
SEMI E142 compliant wafer mapping structure
SECS/GEMS E142 SECS II compliant communication

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