Sawn Wafer Inspection System SI-Series
with wafer mapping E142 compatible to Olympus microscope systems







Benefits
Seamless integrate with Olympus MX-series and BXFM microscope systems
Programmable motorised stage to handle wafer ring size up to 16” or 440 mm
Auto-loader for wafer ring cassette (eliminate handling direct to wafer / product)
Graphical and GUI electronic wafer map or bin code map configuration
RFID for cassette ID registration and automatic wafer ID reader
SEMI E142 compliant wafer mapping structure
SECS/GEMS E142 SECS II compliant communication
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官网(wǎng)网(wǎng)址:http://m.spjj58.com
邮(yóu)箱(xiāng):sally_sheng@m.spjj58.com